000			01905nam a2200361 a 4500
001			vtls000060034
003			KUKTEM
005			20251117145451.0
008			120522t2009 paua f b 101 0 eng d
020			_a9781605111254
020			_a1605111252
039		9	_a201710021127 _bAUTHORITY _c201212031254 _dfauzi _c201212031047 _dfauzi _y201205221535 _zsafura
040			_aUMP
090			_aTK7871.85 .A38 2009
111	2		_aAdvanced Metallization Conference
245	1	0	_aAdvanced Metallization Conference 2008 (AMC 2008) : _bproceedings ... of ... the conferences held September 23-25, 2008, San Diego, California, U.S.A. and October 8-10, 2008, at the University of Tokyo, Tokyo, Japan / _ceditors: Mehul Naik ... [et al.]
246	3	0	_aAMC 2008
260			_aWarrendale, Pa. : _bMaterials Research Society, _cc2009
300			_axxiv, 769 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society conference proceedings
500			_a"This combined Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."--T.p.
504			_aIncludes bibliographical references and indexes
650		0	_aSemiconductors _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses
650		0	_aThin films _vCongresses
650		0	_aMetallic films _vCongresses
650		0	_aMetallizing _vCongresses
700	1		_aNaik, Mehul
710	2		_aUniversity of California, Berkeley. _bContinuing Education in Engineering
830		0	_aMaterials Research Society conference proceedings
999			_aVIRTUA40 _c46824 _d46830
999			_aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*6505*7000*7100*8300*9992