000			01882nam a2200361 a 4500
001			vtls000060022
003			KUKTEM
005			20251117145452.0
008			120522t2006 paua b 101 0 eng d
020			_a9781558998650
020			_a1558998659
039		9	_a201710021127 _bAUTHORITY _c201211281601 _dfauzi _y201205221522 _zsafura
040			_aUMP
090			_aTK7871.85 .A38 2006
111	2		_aAdvanced Metallization Conference
245	1	0	_aAdvanced Metallization Conference 2005 (AMC 2005) : _bproceedings of the conference held September 27-29, 2005, in Colorado Springs, Colorado, U.S.A., and October 13-14, 2005, University of Tokyo, Tokyo, Japan / _ceditors, Sywert H. Brongersma ... [et al.]
246	3	0	_aAMC 2005
260			_aWarrendale, Pa. : _bMaterials Research Society, _cc2006
300			_axxv, 755 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society conference proceedings
500			_a"This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."
504			_aIncludes bibliographical references and indexes
650		0	_aSemiconductors _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses
650		0	_aThin films _vCongresses
650		0	_aMetallic films _vCongresses
650		0	_aMetallizing _vCongresses
700	1		_aBrongersma, Sywert H.
710	2		_aUniversity of California, Berkeley. _bContinuing Education in Engineering
830		0	_aMaterials Research Society conference proceedings
999			_aVIRTUA40 _c46886 _d46892
999			_aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*6505*7000*7100*8300*9992