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| 001 | vtls000032295 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145453.0 | ||
| 008 | 081114t2007 njua f 000 0 eng d | ||
| 020 | _a9780471719199 | ||
| 039 | 9 |
_a201107132155 _bVLOAD _c200908141649 _dVLOAD _c200908141630 _dVLOAD _c200908132128 _dVLOAD _y200811141605 _zsaini |
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| 040 | _aUMP | ||
| 090 | _aTK7874 .M536 2007 | ||
| 245 | 0 | 0 |
_aMicroelectronic applications of chemical mechanical planarization / _cedited by Yuzhuo Li |
| 260 |
_aHoboken, N.J. : _bJohn Wiley, _c2007 |
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| 300 |
_axxv, 734 p. : _bill. ; _c24 cm. |
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| 500 | _a"Wiley Interscience." | ||
| 504 | _aIncludes bibliographical references | ||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction |
|
| 650 | 0 | _aChemical mechanical planarization | |
| 650 | 0 |
_aMicroelectronics _xMaterials |
|
| 700 | 1 | _aLi, Yuzhuo | |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip0715/2007015557.html |
| 999 |
_aVIRTUA40 _c46908 _d46914 |
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