| 000 | 01194nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060651 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145458.0 | ||
| 008 | 120531t2001 paudao f 001 0 eng d | ||
| 020 | _a9781558995215 | ||
| 020 | _a1558995218 | ||
| 039 | 9 |
_a201304101110 _bhuda _y201205310935 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTS654.5 .C44 2001 | ||
| 245 | 0 | 0 |
_aChemical-Mechanical Polishing 2000 : _bfundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. / _ceditors, Rajiv K. Singh ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _cc2001 |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 613 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aElectrolytic polishing _vCongresses |
|
| 650 | 0 |
_aGrinding and polishing _vCongresses |
|
| 650 | 0 |
_aChemical mechanical planarization _vCongresses |
|
| 700 | 1 | _aSingh, R. K. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 613 |
|
| 999 |
_aVIRTUA40 _c47098 _d47104 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992 | ||