| 000 | 01119nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061977 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145506.0 | ||
| 008 | 120615t1992 paua f b 001 0 eng d | ||
| 020 | _a9781558991637 | ||
| 020 | _a1558991638 | ||
| 039 | 9 |
_a201307101447 _bjamie _y201206151035 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .M38 1992 | ||
| 245 | 0 | 0 |
_aMaterials modification by energetic atoms and ions : _bSymposium held April 28-30, 1992, San Francisco, California, USA / _ceditors by Kenneth S. Grabowski ... [et al.] |
| 260 |
_aPittsburgh, PA : _bMaterials Research Society, _cc1992 |
||
| 300 |
_axiii, 405 p. : _bill. ; _c24 cm. |
||
| 490 | 0 |
_aMaterials Research Society symposium proceedings ; _vv. 268 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _xEtching _xCongresses |
|
| 650 | 0 |
_aPlasma etching _xCongresses |
|
| 650 | 0 |
_aIon bombardment _xCongresses |
|
| 650 | 0 |
_aThin films _xCongresses |
|
| 700 | 1 | _aGrabowski, Kenneth S. | |
| 999 |
_aVIRTUA40 _c47359 _d47365 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*9992 | ||