| 000 | 01148nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061812 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145508.0 | ||
| 008 | 120613t1985 paua f b 001 0 eng d | ||
| 020 | _a9780931837104 | ||
| 039 | 9 |
_a201304021230 _bjamie _y201206131053 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .I56 1985 | ||
| 245 | 0 | 0 |
_aIon beam processes in advanced electronic materials and device technology : _bsymposium held April 15-18, 1985, San Francisco, California, U.S.A. / _ceditors, B. R. Appleton, F. H. Eisen, T. W. Sigmon |
| 260 |
_aPittsburgh, PA : _bMaterials Research Society, _cc1985 |
||
| 300 |
_axv, 393 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposia proceedings ; _vv. 45 |
|
| 504 | _aIncludes bibliographies references and index | ||
| 650 | 0 |
_aSemiconductors _xCongresses |
|
| 650 | 0 |
_aIon implantation _xCongresses |
|
| 700 | 1 | _aAppleton, B. R. | |
| 700 | 1 | _aEisen, Fred H. | |
| 700 | 1 | _aSigmon, T. W. | |
| 830 | 0 | _aMaterials Research Society symposia proceedings | |
| 999 |
_aVIRTUA40 _c47441 _d47447 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*7001*7002*8300*9992 | ||