| 000 | 01040nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000043900 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145511.0 | ||
| 008 | 090911t2009 flua f b 001 0 eng d | ||
| 020 | _a1420059114 | ||
| 020 | _a9781420059113 | ||
| 039 | 9 |
_a201204191039 _bida _c201107132214 _dVLOAD _c201009151608 _djamie _y200909111027 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.84 .P35 2009 | ||
| 100 | 1 | _aPaik, Ungyu | |
| 245 | 1 | 0 |
_aNanoparticle engineering for chemical-mechanical planarization : _bfabrication of next-generation nanodevices / _cUngyu Paik, Jea-Gun Park |
| 260 |
_aBoca Raton, FL : _bCRC Press/Taylor & Francis Group, _cc2009 |
||
| 300 |
_axiii, 191 p., [14] p. of plates : _bill. (some col.) ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aChemical mechanical planarization | |
| 650 | 0 | _aNanoparticles | |
| 650 | 0 | _aNanoelectronics | |
| 700 | 1 | _aPark, Jea-Gun | |
| 999 |
_aVIRTUA40 _c47546 _d47552 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5040*6500*6501*6502*7000*9991 | ||