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| 005 | 20251117145521.0 | ||
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_a201306101048 _bjamie _y201206151142 _zsafura |
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| 090 | _aTK7875 .M38 2000 | ||
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_aMaterials science of microelectromechanical systems (MEMS) devices II : _bsymposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. / _ceditors by Maarten P. de Boer ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _cc2000 |
||
| 300 |
_axiii, 314 p. : _bill. ; _c23 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 605 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aMicroelectronics _xMaterials _vCongresses |
|
| 650 | 0 |
_aMicroactuators _xMaterials _vCongresses |
|
| 700 | 1 | _aDe Boer, Maarten P. | |
| 830 | 0 | _aMaterials Research Society symposium proceedings | |
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_aVIRTUA40 _c47884 _d47890 |
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