| 000 | 00910nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000051773 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145530.0 | ||
| 008 | 110309t2009 nyua f 001 0 eng d | ||
| 020 | _a9780387958675 | ||
| 020 | _a0387958673 | ||
| 039 | 9 |
_a201107132223 _bVLOAD _c201107121130 _dasmadi _y201103091109 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.76 .A38 2009 | ||
| 245 | 0 | 0 |
_aAdvanced nanoscale ULSI interconnects : _bfundamentals and applications / _cedited by Yosi Shacham-Diamand ... [et al.] |
| 260 |
_aNew York : _bSpringer, _c2009 |
||
| 300 |
_axx, 537 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration |
|
| 650 | 0 | _aNanoelectromechanical systems | |
| 700 | 1 | _aShacham-Diamand, Yosi | |
| 999 |
_aVIRTUA40 _c48215 _d48221 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*5040*6500*6501*7000*9991 | ||