000 02722nam a2200277 a 4500
001 vtls000057356
003 KUKTEM
005 20251117145550.0
008 111213t2011 nyua f 001 0 eng d
020 _a9780071741958
039 9 _a201204061532
_basmadi
_y201112131535
_zirma
040 _aUMP
090 _aTK7874.893 .A14 2011
245 0 0 _a3D IC stacking technology /
_cBanqiu Wu, Ajay Kumar, Sesh Ramaswami, editors
260 _aNew York :
_bMcGraw-Hill Professional,
_c2011
300 _axviii, 521 p. :
_bill. (chiefly col.) ;
_c24 cm.
504 _aIncludes bibliographical references and index
520 _a"The latest advances in three-dimensional integrated circuit stacking technology 3D IC Stacking Technology is a comprehensive resource on three-dimensional stacking technology, including scientific theory, processing methods, applications, and an overview of the industry’s technological future. The book is targeted to semiconductor engineers and portable device designers. The quality and functional capabilities of nearly all of today’s electronic devices and the production lines that produce them are dependent on key internal semiconductor components--ICs. Lithography and packaging integration are the determining factors in keeping pace with the electronics industry’s quest to have more and more transistors on chip product by shrinking ICs and other related products, or by stacking the multiple chips into one chip device. This in-depth volume covers these cutting-edge technologies. 3D IC Stacking Technology Focuses on industrial applications Includes detailed fabrication processes Covers a separate fabrication step in each chapter, written by an industry expert Provides a one-stop knowledge resource for 3D IC technology Discusses future applications and device design potentials Comprehensive coverage: Design challenges; Process sequence integration; TSV etch; Chemical vapor; Barrier/ seed deposition; ECD fill; Chemical mechanical polishing; Wafer thinning; Temporary and permanent bonding; Cost of ownership"--
_cProvided by publisher
520 _a"This pioneering work explores three-dimensional integrated circuit stacking technology which allows for more transistors on a chip and benefits portable electronics device design with smaller-scale IC, lower power consumption, less heat generation, extended battery life, and lower costs of operation"--
_cProvided by publisher
650 0 _aThree-dimensional integrated circuits
650 0 _aMicroelectronic packaging
700 1 _aWu, Banqiu
700 1 _aKumar, Ajay
700 1 _aRamaswami, Sesh
999 _aVIRTUA40
_c48904
_d48910
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*5200*5201*6500*6501*7000*7001*7002*9991