000			01370nam a2200301 a 4500
001			vtls000061974
003			KUKTEM
005			20251117145607.0
008			120615t1987 paua f 001 0 eng d
020			_a9780931837609
020			_a093183760X
039		9	_a201303291644 _bsaini _y201206151028 _zsafura
040			_aUMP
090			_aTK7871.85 .M38 1987
245	0	0	_aMaterials modification and growth using Ion beams : _bsymposium held April 21-23, 1987, Anaheim, California, U.S.A. / _ceditors, Ursula Gibson, Alice E. White, Peter P. Pronko
260			_aPittsburgh, Pa. : _bMaterials Research Society, _c1987
300			_axix, 415 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society symposia proceedings, _x0272-9172 ; _vv. 93
500			_a"Papers presented at the symposium on Materials Modification and Growth Using Ion Beams held April 21-23, 1987, as part of the MRS meeting in Anaheim, CA"
504			_aIncludes bibliographical references and indexes
650		0	_aIon implantation _vCongresses
650		0	_aSemiconductor doping _vCongresses
700	1		_aGibson, Ursula Jane
700	1		_aWhite, Alice E.
700	1		_aPronko, Peter P.
830		0	_aMaterials Research Society symposia proceedings ; _vv. 93
999			_aVIRTUA40 _c49480 _d49486
999			_aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*5040*6500*6501*7000*7001*7002*8300*9992