| 000 | 00925nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000042390 | ||
| 003 | KUKTEM | ||
| 005 | 20251117145608.0 | ||
| 008 | 090825t2006 nyua f b 001 0 eng d | ||
| 020 | _a9780750309769 | ||
| 020 | _a0750309768 | ||
| 039 | 9 |
_a201107132246 _bVLOAD _c201006141014 _djamie _y200908250917 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTA2020 .M35 2006 | ||
| 100 | 1 | _aMakabe, T. | |
| 245 | 1 | 0 |
_aPlasma electronics : _bapplications in microelectronic device fabrication / _cT. Makabe, Z. Petrović |
| 260 |
_aNew York : _bTaylor & Francis, _c2006 |
||
| 300 |
_a339 p. : _bill. ; _c25 cm. |
||
| 490 | 1 | _aSeries in plasma physics | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aPlasma engineering | |
| 700 | 1 | _aPetrović, Z. | |
| 830 | 0 | _aSeries in plasma physics | |
| 999 |
_aVIRTUA40 _c49493 _d49499 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*4900*5040*6500*7000*8300*9991 | ||