| 000 | 01308nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000037792 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150035.0 | ||
| 008 | 090615t2007 enka f b 001 0 eng d | ||
| 020 | _a9780470013601 (hbk.) | ||
| 020 | _a0470013605 (hbk.) | ||
| 039 | 9 |
_a201107132256 _bVLOAD _c200910260921 _dfauzi _c200908141629 _dVLOAD _c200908141603 _dVLOAD _y200906151123 _znadia |
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| 040 | _aUMP | ||
| 090 | _aTK7871.15.F5 D54 2007 | ||
| 245 | 0 | 0 |
_aDielectric films for advanced microelectronics / _cedited by Mikhail Baklanov, Martin Green, and Karen Maex |
| 260 |
_aChichester, England ; _aHoboken, NJ : _bJohn Wiley & Sons, _cc2007 |
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| 300 |
_axxii, 486 p. : _bill. ; _c26 cm. |
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| 490 | 1 | _aWiley series in materials for electronic and optoelectronic applications | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aDielectric films | |
| 650 | 0 |
_aMicroelectronics _xMaterials |
|
| 700 | 1 | _aBaklanov, Mikhail | |
| 700 | 1 | _aGreen, Martin | |
| 700 | 1 | _aMaex, Karen | |
| 830 | 0 | _aWiley series in materials for electronic and optoelectronic applications | |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip071/2006030740.html |
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