000			01133nam a2200313 4500
001			vtls000012903
003			KUKTEM
005			20251117150102.0
008			060606t2004 xxu gr |0 1 0|eng |
020			_a3527313958
039		9	_a201107132308 _bVLOAD _c201003030814 _dida _c200908141157 _dVLOAD _c200908141128 _dVLOAD _y200606141204 _zVLOAD
040			_aUMP
090			_aTA403 .M37 2005
240	1	0	_aMaterials science and technology, a comprehensive treatment
245	0	0	_aProcessing of metals and alloys / edited by R. W. Cahn, P. Haasen, E. J. Kramer
260			_aWeinheim: _bWiley-VCH, _c2005
300			_a663 p. : _bill. ; _c24 cm.
500			_av. 16. Processing of semiconductors
504			_aIncludes bibliographical references and index
650		0	_aMaterials science
650		0	_aMetals
650		0	_aAlloys
650		0	_aSemiconductors
700	1		_aCahn, R. W.
700	1		_aHaasen, P.
700	1		_aKramer, E. J.
740	0		_aProcessing of semiconductors
999			_aVIRTUA _c51104 _d51110
999			_aVTLSSORT0080*0200*0400*0900*2400*2450*2600*3000*5000*5040*6500*6501*6502*6503*7000*7001*7002*7400*9991