| 000 | 01159nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060547 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150103.0 | ||
| 008 | 120529t1993 paua f b 101 0 eng d | ||
| 020 | _a9781558991774 | ||
| 020 | _a1558991778 | ||
| 039 | 9 |
_a201212111151 _bfauzi _y201205291230 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874 .C44 1993 | ||
| 245 | 0 | 0 |
_aChemical perspectives of microelectronic materials III : _bsymposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. / _ceditors, C.R. Abernathy ... [et al.] |
| 260 |
_aPittsburgh, Pa. : _bMaterials Research Society, _cc1993 |
||
| 300 |
_axv, 727 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 282 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectronics _xMaterials _vCongresses |
|
| 650 | 0 |
_aSemiconductors _vCongresses |
|
| 650 | 0 |
_aSurface chemistry _vCongresses |
|
| 700 | 1 | _aAbernathy, C. R. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 282 |
|
| 999 |
_aVIRTUA40 _c51127 _d51133 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992 | ||