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|---|---|---|---|
| 001 | vtls000038237 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150113.0 | ||
| 008 | 090619t2008 njua f 001 0 eng d | ||
| 020 | _a9789812700766 | ||
| 020 | _a9812700765 | ||
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| 040 | _aUMP | ||
| 090 | _aTA418.9.N35 N366 2008 | ||
| 245 | 0 | 0 |
_aNanofabrication : _bfundamentals and applications / _cedited by Ampere A. Tseng |
| 260 |
_aNew Jersey : _bWorld Scientific , _c2008 |
||
| 300 |
_aviii, 574 p. : _bill. (some col.) ; _c26 cm. |
||
| 500 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aNanostructured materials | |
| 650 | 0 | _aNanostructures | |
| 650 | 0 | _aScanning probe microscopy | |
| 650 | 0 | _aLithography, Electron beam | |
| 700 | 1 | _aTseng, Ampere A. | |
| 999 |
_aVIRTUA40 _c51463 _d51469 |
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