| 000 | 01198nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000059921 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150202.0 | ||
| 008 | 120522t1999 paua f b 101 0 eng d | ||
| 020 | _a9781558994713 | ||
| 020 | _a1558994718 | ||
| 039 | 9 |
_a201212061101 _bfauzi _y201205221031 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .A38 1999 | ||
| 245 | 0 | 0 |
_aAdvanced interconnects and contacts : _bsymposium held April 5-7, 1999, San Francisco, California, U.S.A. / _ceditors, Daniel C. Edelstein ... [et al.] |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _cc1999 |
||
| 300 |
_axiv, 577 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 564 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aSemiconductors _xJunctions _vCongresses |
|
| 650 | 0 |
_aSilicides _vCongresses |
|
| 650 | 0 |
_aSemiconductor-metal boundaries _vCongresses |
|
| 650 | 0 |
_aMetallic films _vCongresses |
|
| 700 | 1 | _aEdelstein, Daniel C. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 564 |
|
| 999 |
_aVIRTUA40 _c53200 _d53206 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*8300*9992 | ||