| 000 | 00980nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000056123 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150208.0 | ||
| 008 | 111118t2011 enka f 001 0 eng d | ||
| 020 | _a9780470978696 | ||
| 039 | 9 |
_a201201301646 _basmadi _y201111181525 _zsri |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .D54 2011 | ||
| 245 | 0 | 0 |
_aDigital holography for MEMS and microsystem metrology / _cedited by Anand Asundi |
| 260 |
_aChichester, West Sussex, UK : _bWiley, _c2011 |
||
| 300 |
_axxii, 205 p. : _bill. ; _c25 cm. |
||
| 490 | 0 | _aWiley microsystem and nanotechnology series | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _xMeasurement |
|
| 650 | 0 |
_aMicroelectronics _xMeasurement |
|
| 650 | 0 | _aHolographic testing | |
| 650 | 0 |
_aImage processing _xDigital techniques |
|
| 700 | 1 | _aAsundi, Anand | |
| 999 |
_aVIRTUA40 _c53407 _d53413 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*9991 | ||