000 00980nam a2200265 a 4500
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008 111118t2011 enka f 001 0 eng d
020 _a9780470978696
039 9 _a201201301646
_basmadi
_y201111181525
_zsri
040 _aUMP
090 _aTK7875 .D54 2011
245 0 0 _aDigital holography for MEMS and microsystem metrology /
_cedited by Anand Asundi
260 _aChichester, West Sussex, UK :
_bWiley,
_c2011
300 _axxii, 205 p. :
_bill. ;
_c25 cm.
490 0 _aWiley microsystem and nanotechnology series
504 _aIncludes bibliographical references and index
650 0 _aMicroelectromechanical systems
_xMeasurement
650 0 _aMicroelectronics
_xMeasurement
650 0 _aHolographic testing
650 0 _aImage processing
_xDigital techniques
700 1 _aAsundi, Anand
999 _aVIRTUA40
_c53407
_d53413
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*9991