000			01838nam a2200349 a 4500
001			vtls000059985
003			KUKTEM
005			20251117150215.0
008			120522t2000 paua f b 101 0 eng d
020			_a9781558995741
020			_a1558995749
039		9	_a201710021127 _bAUTHORITY _c201211301643 _dfauzi _y201205221203 _zsafura
040			_aUMP
090			_aTK7871.85 .A383 2000
111	2		_aAdvanced Metallization Conference
245	1	0	_aAdvanced Metallization Conference 2000 (AMC 2000) : _bproceedings of the conference held October 2-5, 2000, in San Diego, California, U.S.A., and October 19-20, 2000, University of Tokyo, Tokyo, Japan. This Conference is sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. / _ceditors, Dan Edelstein ... [et al]
246	3	0	_aAMC 2000
260			_aWarrendale, Pa. : _bMaterials Research Society, _cc2000
300			_axx, 706 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society conference proceedings, _x1048-0854
504			_aIncludes bibliographical references and index
650		0	_aSemiconductors _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses
650		0	_aThin films _vCongresses
650		0	_aMetallic films _vCongresses
650		0	_aMetallizing _vCongresses
700	1		_aEdelstein, Dan
710	2		_aUniversity of California, Berkeley. _bContinuing Education in Engineering
830		0	_aMaterials Research Society conference proceedings, _x1048-0854
999			_aVIRTUA40 _c53639 _d53645
999			_aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5040*6500*6501*6502*6503*6504*6505*7000*7100*8300*9992