| 000 | 01098nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062107 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150221.0 | ||
| 008 | 120618t2005 paudao f 001 0 eng d | ||
| 020 | _a9781558998261 | ||
| 020 | _a1558998268 | ||
| 039 | 9 |
_a201304171617 _bhuda _y201206181008 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .M53 2005 | ||
| 245 | 0 | 0 |
_aMicro- and nanosystems--materials and devices : _bsymposium held March 28-April 1, 2005, San Francisco, California, U.S.A. / _ceditors: Cengiz S. Ozkan ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2005 |
||
| 300 |
_axv, 525 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 872 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aNanotechnology _vCongresses |
|
| 700 | 1 | _aOzkan, Cengiz S. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 872 |
|
| 999 |
_aVIRTUA40 _c53866 _d53872 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*8300*9992 | ||