| 000 | 01370nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060584 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150229.0 | ||
| 008 | 120529t2003 paudao f 001 0 eng d | ||
| 020 | _a9781558997042 | ||
| 020 | _a1558997040 | ||
| 039 | 9 |
_a201304091446 _bhuda _c201304091417 _dhuda _y201205291700 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871 .C44 2003 | ||
| 245 | 0 | 0 |
_aChemical-mechanical planarization : _bsymposium held April 22-24, 2003, San Francisco, California, U.S.A. / _ceditors: Duane S. Boning ... [et al.]. |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _c2003 |
||
| 300 |
_axi, 348 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _v767 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectronics _xMaterials _vCongresses |
|
| 650 | 0 |
_aGrinding and polishing _vCongresses |
|
| 650 | 0 |
_aMetals _xPickling _vCongresses |
|
| 650 | 0 |
_aSemiconductors _xSurfaces _vCongresses |
|
| 650 | 0 |
_aChemical mechanical planarization _vCongresses |
|
| 700 | 1 | _aBoning, Duane S. | |
| 710 | 2 |
_aMaterials Research Society. _bMeeting _d(2003 : _cSan Francisco, Calif.) |
|
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 767 |
|
| 999 |
_aVIRTUA40 _c54101 _d54107 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7100*8300*9992 | ||