000 00864nam a2200241 a 4500
001 vtls000057284
003 KUKTEM
005 20251117150321.0
008 111213t2008 njua f b 001 0 eng d
020 _a9780130450180 (pbk.)
020 _a0130450189 (pbk.)
039 9 _a201202091637
_bfauzi
_y201112131034
_zsri
040 _aUMP
090 _aTJ940 .H38 2008
100 1 _aHata, David M.
245 1 0 _aIntroduction to vacuum technology /
_cDavid Hata
260 _aUpper Saddle River, N.J. :
_bPearson Prentice Hall,
_cc2008
300 _avii, 187 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index
650 0 _aVacuum technology
856 4 1 _3Table of contents only
_uhttp://www.loc.gov/catdir/toc/ecip075/2006038591.html
999 _aVIRTUA40
_c55879
_d55885
999 _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5040*6500*8560*9991