| 000 | 00881nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000052769 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150403.0 | ||
| 008 | 110411t2010 enk f 001 0 eng d | ||
| 020 | _a9780470749838 (cloth) | ||
| 039 | 9 |
_a201109291543 _bfauzi _c201107140045 _dVLOAD _y201104111613 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .F73 2010 | ||
| 100 | 1 | _aFranssila, Sami | |
| 245 | 1 | 0 |
_aIntroduction to microfabrication / _cSami Franssila |
| 250 | _a2nd ed. | ||
| 260 |
_aChichester, West Sussex, England ; _aHoboken, NJ : _bJohn Wiley & Sons, _c2010 |
||
| 300 |
_a[xv], 518 p. : _bill. ; _c25 cm. |
||
| 500 | _aIncludes index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aElectronic apparatus and appliances | |
| 650 | 0 | _aMicrofabrication | |
| 999 |
_aVIRTUA40 _c57324 _d57330 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*1000*2450*2500*2600*3000*5000*6500*6501*6502*9991 | ||