| 000 | 00766nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | vtls000055956 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150403.0 | ||
| 008 | 111115t2011 njua f 001 0 eng d | ||
| 020 | _a9780470466346 | ||
| 039 | 9 |
_a201202071225 _basmadi _y201111151230 _zsri |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .P75 2011 | ||
| 245 | 0 | 0 |
_aPrinciples of microelectromechanical systems / _cedited by Ki Bang Lee |
| 246 | 3 | _aPrinciples of MEMS | |
| 260 |
_aHoboken, N.J. : _bWiley, _c2011 |
||
| 300 |
_axii, 667 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 700 | 1 | _aLee, Ki Bang | |
| 999 |
_aVIRTUA40 _c57343 _d57349 |
||
| 999 | _aVTLSSORT0080*0200*0400*0900*2450*2460*2600*3000*5040*6500*7000*9991 | ||