000 00885nam a2200253 a 4500
001 vtls000060075
003 KUKTEM
005 20251117150407.0
008 120523t2012 nyua f b 001 0 eng d
020 _a9781441958310
039 9 _a201305091217
_bjamie
_c201301091207
_dida
_y201205230849
_zfarina
040 _aUMP
090 _aTJ216 .F44 2012
245 0 0 _aFeedback control of MEMS to atoms /
_ceditors by Jason J. Gorman, Benjamin Shapiro
260 _aNew York :
_bSpringer,
_cc2012
300 _aviii, 384 p. :
_bill. ;
_c25 cm.
504 _aIncludes bibliographical references and index
650 0 _aFeedback control systems
650 0 _aMicroelectromechanical systems
650 0 _aMicroelectronics
700 1 _aGorman, Jason J.
700 1 _aShapiro, Benjamin
999 _aVIRTUA40
_c57479
_d57485
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*6501*6502*7000*7001*9992