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| 001 | vtls000053700 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150416.0 | ||
| 008 | 110603t2010 xxka f 001 0 eng d | ||
| 020 | _a9780080964546 | ||
| 020 | _a0080964540 | ||
| 039 | 9 |
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| 040 | _aUMP | ||
| 090 | _aT174.7 .L43 2010 | ||
| 100 | 1 | _aLeach, Richard | |
| 245 | 1 | 0 |
_aFundamental principles of engineering nanometrology / _cby Richard K. Leach |
| 260 |
_aOxford, UK : _bElsevier Science, _c2010 |
||
| 300 |
_axxvi, 321 p. : _bill. ; _c24 cm. |
||
| 490 | 1 | _aMicro and nano technologies | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aNanotechnology | |
| 650 | 0 | _aMicrotechnology | |
| 650 | 0 | _aMetrology | |
| 830 | 0 | _aMicro and nano technologies | |
| 999 |
_aVIRTUA40 _c57783 _d57789 |
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