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| 001 | vtls000015043 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150430.0 | ||
| 008 | 060810t2005 flua f 001 0 eng d | ||
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| 040 | _aUMP | ||
| 090 | _aTK7875 .L97 2005 | ||
| 100 | 1 | _aLyshevski, Sergey Edward | |
| 245 | 1 | 0 |
_aNano-and micro-electromechanical systems : _bfundamentals of nano- and microengineering / _cSergey Edward Lyshevski |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton, Florida : _bCRC Press, _c2005 |
||
| 300 |
_a722 p. : _bill. ; _c26 cm |
||
| 440 | _aNano- and microscience, engineering, technology, and medicine series | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aNanotechnology | |
| 999 |
_aVIRTUA40 _c58236 _d58242 |
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