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008 060810t2005 flua f 001 0 eng d
020 _a0849328381
039 9 _a201205081142
_bFida
_c201107131835
_dVLOAD
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_dVLOAD
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_y200608100847
_zdilla
040 _aUMP
090 _aTK7875 .L97 2005
100 1 _aLyshevski, Sergey Edward
245 1 0 _aNano-and micro-electromechanical systems :
_bfundamentals of nano- and microengineering /
_cSergey Edward Lyshevski
250 _a2nd ed.
260 _aBoca Raton, Florida :
_bCRC Press,
_c2005
300 _a722 p. :
_bill. ;
_c26 cm
440 _aNano- and microscience, engineering, technology, and medicine series
650 0 _aMicroelectromechanical systems
650 0 _aNanotechnology
999 _aVIRTUA40
_c58236
_d58242
999 _aVTLSSORT0080*0200*0400*0900*1000*2450*2500*2600*3000*4400*6500*6501*9991