| 000 | 00885nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000041455 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150434.0 | ||
| 008 | 090817t2009 gw a f b 001 0 eng d | ||
| 020 | _a9783540745587 | ||
| 039 | 9 |
_a201107132204 _bVLOAD _c201003181632 _dfauzi _y200908171040 _znadia |
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| 040 | _aUMP | ||
| 090 | _aTK7871.85 .I58 2009 | ||
| 245 | 0 | 0 |
_aInto the nano era / _cHoward Huff, editor |
| 260 |
_aBerlin : _bSpringer, _cc2009 |
||
| 300 |
_axxviii, 343 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aSpringer series in materials science ; _v106 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aIntegrated circuits _xHistory |
|
| 650 | 0 |
_aSilicon _xElectric properties |
|
| 650 | 0 |
_aSemiconductors _xMaterials |
|
| 700 | 1 | _aHuff, Howard R. | |
| 999 |
_aVIRTUA40 _c58355 _d58361 |
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