| 000 | 01292nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000043606 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150440.0 | ||
| 008 | 090909t2005 sz a f 001 0 eng d | ||
| 020 | _a3908451132 | ||
| 020 | _a9783908451136 | ||
| 039 | 9 |
_a201107132249 _bVLOAD _c201104191429 _dida _y200909091035 _zfaiz |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.85 .A98 2005 | ||
| 111 | 2 |
_aInternational Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" _n(11th : _d2005 : _cGiens, France) |
|
| 245 | 1 | 0 |
_aProceeding of the 11th International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology : _bGADEST 2005, Giens, France, September 25-30, 2005 |
| 246 | 3 | _aGettering and Defect Engineering in Semiconductor Technology | |
| 260 |
_aUetikon-Zurich, Switzerland : _bTrans Tech Pub., _cc2005 |
||
| 300 |
_axvi, 814 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSemiconductors _vCongresses |
|
| 650 | 0 |
_aGetters _vCongresses |
|
| 650 | 0 |
_aSilicon crystals _xDefects _vCongresses |
|
| 650 | 0 |
_aElectrical engineering _xMaterials _vCongresses |
|
| 700 | 1 | _aPichaud, B. | |
| 999 |
_aVIRTUA40 _c58560 _d58566 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*5040*6500*6501*6502*6503*7000*9991 | ||