000 00902nam a2200253 a 4500
001 vtls000016735
003 KUKTEM
005 20251117150450.0
008 061130 000 0 eng d
020 _a0849391385
039 9 _a201107131849
_bVLOAD
_c200908141245
_dVLOAD
_c200908141218
_dVLOAD
_c200908131642
_dVLOAD
_y200611301230
_zkam
040 _aUMP
090 _aTK7875 .M465 2006
245 0 0 _aMEMS :
_bintroduction and fundamentals /
_cedited by Mohamed Gad-el-Hak
250 _a2nd ed.
260 _aBoca Raton :
_bTaylor & Francis,
_c2006
300 _a(various pagings) :
_bill. ;
_c26 cm.
440 _aMechanical engineering series
650 0 _aMicroelectromechanical systems
650 0 _aMicroelectronics
650 0 _aNanotechnology
700 1 _aGad-El-Hak, Mohamed
999 _aVIRTUA
_c58899
_d58905
999 _aVTLSSORT0080*0200*0900*2450*2500*2600*3000*4400*6500*6501*6502*7000*9991