| 000 | 00902nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | vtls000016735 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150450.0 | ||
| 008 | 061130 000 0 eng d | ||
| 020 | _a0849391385 | ||
| 039 | 9 |
_a201107131849 _bVLOAD _c200908141245 _dVLOAD _c200908141218 _dVLOAD _c200908131642 _dVLOAD _y200611301230 _zkam |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .M465 2006 | ||
| 245 | 0 | 0 |
_aMEMS : _bintroduction and fundamentals / _cedited by Mohamed Gad-el-Hak |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bTaylor & Francis, _c2006 |
||
| 300 |
_a(various pagings) : _bill. ; _c26 cm. |
||
| 440 | _aMechanical engineering series | ||
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aMicroelectronics | |
| 650 | 0 | _aNanotechnology | |
| 700 | 1 | _aGad-El-Hak, Mohamed | |
| 999 |
_aVIRTUA _c58899 _d58905 |
||
| 999 | _aVTLSSORT0080*0200*0900*2450*2500*2600*3000*4400*6500*6501*6502*7000*9991 | ||