000 00951nam a2200277 a 4500
001 vtls000016581
003 KUKTEM
005 20251117150456.0
008 061122 000 0 eng d
020 _a0849391393
039 9 _a201107131848
_bVLOAD
_c200908141243
_dVLOAD
_c200908141216
_dVLOAD
_c200908131641
_dVLOAD
_y200611221036
_zkam
040 _aUMP
090 _aTK7875 .M46 2006
245 0 0 _aMEMS applications /
_cedited by Mohamed Gad-el-Hak
250 _a2nd ed.
260 _aBoca Raton :
_bTaylor & Francis,
_c2006
300 _a(various pagings) :
_bill. ;
_c26 cm.
440 4 _aThe MEMS handbook
650 0 _aMicroelectromechanical systems
650 0 _aDetectors
650 0 _aMicroactuators
650 0 _aRobots
700 1 _aGad-El-Hak, Mohamed
856 4 2 _ahttp://www.loc.gov/catdir/toc/fy0702/2005051409.html
999 _aVIRTUA40
_c59101
_d59107
999 _aVTLSSORT0080*0200*0900*2450*2500*2600*3000*4400*6500*6501*6502*6503*7000*8560*9991