| 000 | 00951nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000016581 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150456.0 | ||
| 008 | 061122 000 0 eng d | ||
| 020 | _a0849391393 | ||
| 039 | 9 |
_a201107131848 _bVLOAD _c200908141243 _dVLOAD _c200908141216 _dVLOAD _c200908131641 _dVLOAD _y200611221036 _zkam |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .M46 2006 | ||
| 245 | 0 | 0 |
_aMEMS applications / _cedited by Mohamed Gad-el-Hak |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bTaylor & Francis, _c2006 |
||
| 300 |
_a(various pagings) : _bill. ; _c26 cm. |
||
| 440 | 4 | _aThe MEMS handbook | |
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aDetectors | |
| 650 | 0 | _aMicroactuators | |
| 650 | 0 | _aRobots | |
| 700 | 1 | _aGad-El-Hak, Mohamed | |
| 856 | 4 | 2 | _ahttp://www.loc.gov/catdir/toc/fy0702/2005051409.html |
| 999 |
_aVIRTUA40 _c59101 _d59107 |
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| 999 | _aVTLSSORT0080*0200*0900*2450*2500*2600*3000*4400*6500*6501*6502*6503*7000*8560*9991 | ||