| 000 | 01247nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls000051859 | ||
| 003 | KUKTEM | ||
| 005 | 20251117150505.0 | ||
| 008 | 110311t2011 enka f 001 0 eng d | ||
| 020 | _a9781848212022 (hardback) | ||
| 020 | _a184821202X (hardback) | ||
| 039 | 9 |
_a201110131222 _bfauzi _c201107140037 _dVLOAD _y201103110957 _zirma |
|
| 040 | _aUMP | ||
| 090 | _aTK7872.M3 L58 2011 | ||
| 245 | 0 | 0 |
_aLithography : _bmain techniques / _cedited by Stefan Landis |
| 260 |
_aLondon : _bISTE ; _aHoboken, NJ : _bWiley, _c2011 |
||
| 300 |
_axxv, 377 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 520 | _a"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher | ||
| 650 | 0 | _aMicrolithography | |
| 700 | 1 | _aLandis, Stefan | |
| 999 |
_aVIRTUA40 _c59385 _d59391 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*5040*5200*6500*7000*9991 | ||