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| 001 | vtls000052682 | ||
| 003 | KUKTEM | ||
| 005 | 20251125092956.0 | ||
| 008 | 110407t2010 enka f 001 0 eng d | ||
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| 040 | _aUMP | ||
| 090 | _aTH7694 .W49 2010 | ||
| 100 | 1 | _aWhyte, W. | |
| 245 | 1 | 0 |
_aCleanroom technology : _bfundamentals of design, testing and operation / _cW. Whyte |
| 250 | _a2nd ed. | ||
| 260 |
_aChichester, West Sussex, UK : _bJohn Wiley & Sons, _c2010 |
||
| 300 |
_axi, 367 p. : _bill. ; _c24 cm. |
||
| 500 | _aIncludes index | ||
| 650 | 0 | _aClean rooms | |
| 999 |
_aVIRTUA40 _c60125 _d60131 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2500*2600*3000*5000*6500*9991 | ||
| 942 | 0 | 0 | _07 |