| 000 | 01190nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000055974 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093000.0 | ||
| 008 | 111116t2011 enka f b 001 0 eng d | ||
| 020 | _a9781848212114 | ||
| 020 | _a1848212119 | ||
| 039 | 9 |
_a201202011630 _bfauzi _y201111161028 _zsri |
|
| 040 | _aUMP | ||
| 090 | _aTK7872.M3 N36 2011 | ||
| 130 | 0 |
_aNanolithography _lEnglish |
|
| 245 | 1 | 0 |
_aNano-lithography / _cedited by Stefan Landis |
| 260 |
_aLondon, UK : _bISTE ; _aHoboken, NJ : _bWiley, _c2011 |
||
| 300 |
_axxv, 325 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 505 | 0 | _aCh. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography | |
| 650 | 0 | _aMicrolithography | |
| 650 | 0 | _aNanotechnology | |
| 700 | 1 | _aLandis, Stefan | |
| 999 |
_aVIRTUA40 _c60183 _d60189 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1300*2450*2600*3000*5040*5050*6500*6501*7000*9991 | ||