| 000 | 01166nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061717 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093037.0 | ||
| 008 | 120611t1999 paua f b 001 0 eng d | ||
| 020 | _a9781558994768 | ||
| 020 | _a1558994769 | ||
| 039 | 9 |
_a201304031220 _bjamie _y201206111642 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7872.T55 I57 1999 | ||
| 245 | 0 | 0 |
_aIn situ process diagnostics and modelling : _bsymposium held April 6-7, 1999, San Francisco, California, U.S.A. / _ceditors by Orlando Auciello ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _cc1999 |
||
| 300 |
_axi, 199 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 569 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aThin film devices _xDesign and construction _vCongresses |
|
| 650 | 0 |
_aPlasma diagnostics _vCongresses |
|
| 650 | 0 |
_aLasers _xIndustrial applications _vCongresses |
|
| 700 | 1 | _aAuciello, Orlando | |
| 830 | 0 | _aMaterials Research Society symposium proceedings | |
| 999 |
_aVIRTUA40 _c60834 _d60840 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992 | ||