000 01166nam a2200277 a 4500
001 vtls000061717
003 KUKTEM
005 20251125093037.0
008 120611t1999 paua f b 001 0 eng d
020 _a9781558994768
020 _a1558994769
039 9 _a201304031220
_bjamie
_y201206111642
_zsafura
040 _aUMP
090 _aTK7872.T55 I57 1999
245 0 0 _aIn situ process diagnostics and modelling :
_bsymposium held April 6-7, 1999, San Francisco, California, U.S.A. /
_ceditors by Orlando Auciello ... [et al.]
260 _aWarrendale, PA :
_bMaterials Research Society,
_cc1999
300 _axi, 199 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society symposium proceedings ;
_vv. 569
504 _aIncludes bibliographical references and index
650 0 _aThin film devices
_xDesign and construction
_vCongresses
650 0 _aPlasma diagnostics
_vCongresses
650 0 _aLasers
_xIndustrial applications
_vCongresses
700 1 _aAuciello, Orlando
830 0 _aMaterials Research Society symposium proceedings
999 _aVIRTUA40
_c60834
_d60840
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992