000 01210nam a2200265 a 4500
001 vtls000062345
003 KUKTEM
005 20251125093037.0
008 120619t2001 paua g bi 001 0 eng d
020 _a9781558995468
020 _a1558995463
039 9 _a201407241528
_bsafura
_c201407021155
_dsafura
_y201206191004
_zsafura
040 _aUMP
090 _aTK7874 .N66 2001
245 0 0 _aNonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics :
_bsymposium held November 26-December 1, 2000, Boston, Massachusetts, U.S.A. /
_ceditors: Lhadi Merhari ... [et al.].
260 _aWarrendale, Pa. :
_bMaterials Research Society,
_c2001
300 _a1 v. (various pagings) :
_bill. ;
_c23 cm.
490 1 _aMaterials Research Society symposium proceedings ;
_vv. 636
504 _aIncludes bibliographical references and index.
650 0 _aIntegrated circuits
_xDesign and construction
_vCongresses
650 0 _aNanotechnology
_vCongresses
650 0 _aMolecular electronics
_vCongresses
700 1 _aMerhari, Lhadi
999 _aVIRTUA40
_c60842
_d60848
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*9992