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008 111209t2011 nyua f b 100 0 eng d
020 _a9781461402091
039 9 _a201205141633
_bjamie
_c201205141558
_djamie
_y201112091512
_zsafura
040 _aUMP
090 _aQH513 .S46 2011
111 2 _aSEM Conference on Experimental and Applied Mechanics
_d(2011 :
_cUncasville, Conn.)
245 1 0 _aMEMS and nanotechnology.
_nVol. 4 :
_bproceedings of the 2011 annual conference on experimental and applied mechanics /
_cTom Proulx, editor
260 _aNew York :
_bSpringer,
_cc2011
300 _aviii, 191 p. :
_bill. ;
_c29 cm.
490 1 _aConference proceedings of the society for experimental mechanics series
504 _aIncludes bibliographical references
650 0 _aMicroelectromechanical systems
_vCongresses
650 0 _aNanotechnology
_vCongresses
700 1 _aProulx, Tom
830 0 _aConference proceedings of the society for experimental mechanics series
999 _aVIRTUA40
_c60887
_d60893
999 _aVTLSSORT0080*0200*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*7000*8300*9991