| 000 | 01414nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062356 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093041.0 | ||
| 008 | 120619t2003 paua f b 001 0 eng d | ||
| 020 | _a9781558996823 | ||
| 020 | _a1558996826 | ||
| 039 | 9 |
_a201304021517 _bjamie _y201206191023 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.99.M44 S96 2003 | ||
| 111 | 2 |
_aSymposium N, "Novel Materials and Processes for Advanced CMOS" _d(2002 : _cBoston, Mass.) |
|
| 245 | 0 | 0 |
_aNovel materials and processes for advanced CMOS : _bsymposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. / _ceditors by Mark I. Gardner ... [et al.] |
| 260 |
_aWarrendale, PA : _bMaterials Research Society, _cc2003 |
||
| 300 |
_axiii, 384 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 745 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMetal oxide semiconductors _xMaterials _vCongresses |
|
| 650 | 0 |
_aMetal oxide semiconductors, Complementary _xMaterials _vCongresses |
|
| 650 | 0 |
_aNanostructured materials _vCongresses |
|
| 650 | 0 |
_aGate array circuits _xMaterials _vCongresses |
|
| 650 | 0 |
_aDielectrics _vCongresses |
|
| 700 | 1 | _aGardner, Mark I. | |
| 830 | 0 | _aMaterials Research Society symposium proceedings | |
| 999 |
_aVIRTUA40 _c60903 _d60909 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992 | ||