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008 120619t1992 paua f 001 0 eng d
020 _a9781558991309
020 _a1558991301
039 9 _a201307101203
_bsaini
_y201206191443
_zsafura
040 _aUMP
090 _aTA418.7 .P46 1992
245 0 0 _aPhotons and low energy particles in surface processing :
_bsymposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. /
_ceditors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang
260 _aPittsburgh, Pa. :
_bMaterials Research Society,
_c1992
300 _axv, 552 p. :
_bill. ;
_c24 cm.
490 1 _aMaterials Research Society symposium proceedings,
_x0272-9172 ;
_vv. 236
504 _aIncludes bibliographical references and index
650 0 _aSurfaces (Technology)
_vCongresses
650 0 _aPlasma etching
_vCongresses
650 0 _aLasers
_xIndustrial applications
_vCongresses
650 0 _aPhoton beams
_xIndustrial applications
_vCongresses
650 0 _aPlasma-enhanced chemical vapor deposition
_vCongresses
700 1 _aAshby, Carol Iris Hill
700 1 _aBrannon, James H.
700 1 _aPang, Stella W.
830 0 _aMaterials Research Society symposium proceedings ;
_vv. 236
999 _aVIRTUA40
_c61314
_d61320
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7001*7002*8300*9992