| 000 | 01419nam a2200325 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062493 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093106.0 | ||
| 008 | 120619t1992 paua f 001 0 eng d | ||
| 020 | _a9781558991309 | ||
| 020 | _a1558991301 | ||
| 039 | 9 |
_a201307101203 _bsaini _y201206191443 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTA418.7 .P46 1992 | ||
| 245 | 0 | 0 |
_aPhotons and low energy particles in surface processing : _bsymposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. / _ceditors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang |
| 260 |
_aPittsburgh, Pa. : _bMaterials Research Society, _c1992 |
||
| 300 |
_axv, 552 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings, _x0272-9172 ; _vv. 236 |
|
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aSurfaces (Technology) _vCongresses |
|
| 650 | 0 |
_aPlasma etching _vCongresses |
|
| 650 | 0 |
_aLasers _xIndustrial applications _vCongresses |
|
| 650 | 0 |
_aPhoton beams _xIndustrial applications _vCongresses |
|
| 650 | 0 |
_aPlasma-enhanced chemical vapor deposition _vCongresses |
|
| 700 | 1 | _aAshby, Carol Iris Hill | |
| 700 | 1 | _aBrannon, James H. | |
| 700 | 1 | _aPang, Stella W. | |
| 830 | 0 |
_aMaterials Research Society symposium proceedings ; _vv. 236 |
|
| 999 |
_aVIRTUA40 _c61314 _d61320 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7001*7002*8300*9992 | ||