| 000 | 01397nam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | vtls000062119 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093113.0 | ||
| 008 | 120618t2011 nyuda f 001 0 eng d | ||
| 020 | _a9781605112763 | ||
| 020 | _a1605112763 | ||
| 039 | 9 |
_a201304181522 _bhuda _y201206181032 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7875 .S96 2010 | ||
| 111 | 2 |
_aSymposium S, "Microelectromechanical Systems--Materials and Devices IV" _d(2010 : _cBoston, Mass.) |
|
| 245 | 1 | 0 |
_aMicroelectromechanical systems--materials and devices IV : _bsymposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / _ceditors, Frank W. DelRio ... [et al.] |
| 260 |
_aNew York : _bCambridge University Press, _c2011 |
||
| 300 |
_aix, 207 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 1299 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectromechanical systems _xMaterials _vCongresses |
|
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses |
|
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 0 |
_aNanostructured materials _vCongresses |
|
| 650 | 0 |
_aSilicon _vCongresses |
|
| 700 | 1 | _aDelRio, Frank W. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 1299 |
|
| 999 |
_aVIRTUA40 _c61436 _d61442 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*8300*9992 | ||