| 000 | 00958nam a2200277 a 4500 | ||
|---|---|---|---|
| 001 | vtls000064346 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093218.0 | ||
| 008 | 120928t2011 nyua f b 001 0 eng d | ||
| 020 | _a9780387473161 | ||
| 020 | _a0387473165 | ||
| 039 | 9 |
_a201302141045 _bjamie _y201209281632 _zsafura |
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| 040 | _aUMP | ||
| 090 | _aTJ163 .M46 2011 | ||
| 245 | 0 | 0 |
_aMEMS materials and processes handbook / _ceditors by Reza Ghodssi, Pinyen Lin |
| 260 |
_aNew York ; _aLondon : _bSpringer, _cc2011 |
||
| 300 |
_axxxv, 1187 p. : _bill. ; _c24 cm. |
||
| 490 | 1 | _aMEMS reference shelf | |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _xMaterials |
|
| 650 | 0 | _aMicroelectromechanical systems | |
| 700 | 1 | _aGhodssi, Reza | |
| 700 | 1 | _aLin, Pinyen | |
| 830 | 0 | _aMEMS reference shelf | |
| 999 |
_aVIRTUA40 _c62467 _d62473 |
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| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*7001*8300*9992 | ||