000			01448nam a2200313 a 4500
001			vtls000060094
003			KUKTEM
005			20251125093238.0
008			120523t2004 paua f 001 0 eng d
020			_a9781558997660
020			_a1558997660
039		9	_a201211281206 _basmadi _c201211281135 _dasmadi _y201205231011 _zsafura
040			_aUMP
090			_aTS654.5 .A38 2004
111	2		_aSymposium
245	0	0	_aAdvances in chemical-mechanical polishing : _bsymposium held April 13-15, 2004, San Francisco, California, U.S.A. / _ceditors, Duane S. Boning ... [et al.]
250			_av. 816
260			_aWarrendale, PA. : _bMaterials Research Society, _cc2004
300			_axi, 292 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society symposium proceedings ; _vv. 816
500			_a"The papers here were presented at Symposium K, ’Advances in Chemical-Mechanical Polishing,’ held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi
504			_aIncludes bibliographical references and index
650		0	_aElectrolytic polishing _vCongresses
650		0	_aGrinding and polishing _vCongresses
650		0	_aChemical mechanical planarization _vCongresses
700	1		_aBoning, Duane S.
830		0	_aMaterials Research Society symposium proceedings ; _vv. 816
999			_aVIRTUA40 _c62843 _d62849
999			_aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2500*2600*3000*4900*5000*5040*6500*6501*6502*7000*8300*9992