000 01099nam a2200253 a 4500
001 vtls000065818
003 KUKTEM
005 20251125093248.0
008 121108t2012 mauao f 001 0 eng d
020 _a9781608072132
020 _a1608072134
039 9 _a201303141505
_bsaini
_c201303110852
_dsaini
_y201211081453
_znadia
040 _aUMP
090 _aQC611.S9 R63 2012
100 1 _aRobertson, Max
245 1 0 _aSubstrate surface preparation handbook /
_bMax Robertson
260 _aNorwood, MA :
_bArtech House,
_c2012
300 _a195 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index
505 0 _aIntroduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry
650 0 _aSemiconductors
_xSurfaces
650 0 _aEpitaxy
999 _aVIRTUA40
_c63017
_d63023
999 _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5040*5050*6500*6501*9992