000			01935nam a2200361 a 4500
001			vtls000060013
003			KUKTEM
005			20251125093307.0
008			120522t2003 paua f b 101 0 eng d
020			_a9781558997196
020			_a1558997199
039		9	_a201710021127 _bAUTHORITY _c201212031253 _dfauzi _c201211281541 _dfauzi _c201211281517 _dfauzi _y201205221502 _zsafura
040			_aUMP
090			_aTK7871.85 .A38 2003
111	2		_aAdvanced Metallization Conference
245	1	0	_aAdvanced Metallization Conference 2002 (AMC 2002) : _bproceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan / _ceditors, Bradley M. Melnick ... [et al.]
246	3	0	_aAMC 2002
260			_aWarrendale, Pa. : _bMaterials Research Society, _cc2003
300			_axxiv, 881 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society conference proceedings, _x1048-0854
500			_a"This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."
504			_aIncludes bibliographical references and indexes
650		0	_aSemiconductors _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xDesign and construction _vCongresses
650		0	_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses
650		0	_aThin films _vCongresses
650		0	_aMetallic films _vCongresses
650		0	_aMetallizing _vCongresses
700	1		_aMelnick, Bradley M.
710	2		_aUniversity of California, Berkeley. _bContinuing Education in Engineering
830		0	_aMaterials Research Society conference proceedings, _x1048-0854
999			_aVIRTUA40 _c63328 _d63334
999			_aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*6505*7000*7100*8300*9992