000			02109nam a2200277 a 4500
001			vtls000059755
003			KUKTEM
005			20251125093313.0
008			120514t2011 enkab f b 001 0 eng d
020			_a9780521889254(hardback)
020			_a0521889251 (hardback)
020			_a9781107645790 (pbk.)
020			_a1107645794 (pbk.)
039		9	_a201211161210 _bfauzi _y201205141204 _zsafura
040			_aUMP
090			_aTK7875 .K83 2011
100	1		_aKubby, Joel A.
245	1	2	_aA guide to hands-on MEMS design and prototyping / _cJoel Kubby
260			_aCambridge, UK ; _aNew York : _bCambridge University Press, _c2011
300			_axi, 166 p., [16] p. of plates : _bill. (some col.) ; _c24 cm.
504			_aIncludes bibliographical references and index
505	8		_aMachine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics
520			_aWhether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There’s also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"-- Provided by publisher
650		0	_aMicroelectromechanical systems
999			_aVIRTUA40 _c63426 _d63432
999			_aVTLSSORT0080*0200*0201*0202*0203*0400*0900*1000*2450*2600*3000*5040*5050*5200*6500*9992