000			01509nam a2200289 a 4500
001			vtls000062521
003			KUKTEM
005			20251125093323.0
008			120619t2011 xxkda f 001 0 eng d
020			_a9780521763004
020			_a0521763002
039		9	_a201302141436 _bsaini _y201206191535 _zsafura
040			_aUMP
090			_aTA2020 .C43 2011
100	1		_aChabert, Pascal, _d1969-
245	1	0	_aPhysics of radio-frequency plasmas / _cPascal Chabert, CNRS, Nicholas Braithwaite, The Open University
260			_aCambridge, UK : _bCambridge University Press, _c2011
300			_aviii, 385 pages : _bill. ; _c26 cm.
504			_aIncludes bibliographical references and index
505	8		_aMachine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index
650		0	_aLow temperature plasmas
650		0	_aRadio frequency
700	1		_aBraithwaite, Nicholas _q(Nicholas St. J.)
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy1208/2010042728-t.html
856	4	2	_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy1208/2010042728-b.html
999			_aVIRTUA40 _c63590 _d63596
999			_aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5040*5050*6500*6501*7000*8560*8561*9992