| 000 | 01245nam a2200289 a 4500 | ||
|---|---|---|---|
| 001 | vtls000061495 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093329.0 | ||
| 008 | 120608t2001 pauda f 001 0 eng d | ||
| 020 | _a9781558995192 | ||
| 020 | _a1558995196 | ||
| 039 | 9 |
_a201302131426 _bsaini _y201206081013 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874.76 .G38 2001 | ||
| 245 | 0 | 0 |
_aGate stack and silicide issues in silicon processing : _bsymposium held April 25-27, 2000, San Francisco, California, U.S.A. / _ceditors L.A. Clevenger ... [et al.] |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _c2001 |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 611 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xMaterials _vCongresses |
|
| 650 | 0 |
_aSilicides _vCongresses |
|
| 650 | 0 |
_aGate array circuits _vCongresses |
|
| 650 | 0 |
_aElectric leakage _vCongresses |
|
| 700 | 1 | _aClevenger, L. A. | |
| 830 | 0 |
_aMaterials Research Society symposium proceedings ; _vv. 611 |
|
| 999 |
_aVIRTUA40 _c63713 _d63719 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*8300*9992 | ||