000			01743nam a2200325 a 4500
001			vtls000060670
003			KUKTEM
005			20251125093332.0
008			120531t2009 paua f 001 0 eng d
020			_a9781605111285
020			_a1605111287
039		9	_a201301310934 _bsaini _c201205311005 _dsafura _y201205311004 _zsafura
040			_aUMP
090			_aTK7871.99.M44 C56 2009
245	0	0	_aCMOS gate-stack scaling-- materials, interfaces and reliability implications : _bsymposium held April 14-16, 2009, San Francisco, California, U.S.A. / _ceditors, Alexander A. Demkov ... [et al.]
260			_aWarrendale, Pa. : _bMaterials Research Society, _c2009
300			_aviii, 179 p. : _bill. ; _c24 cm.
490	1		_aMaterials Research Society symposium proceedings _vv. 1155
500			_a" ... Symposium C, ’CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,’ held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- Preface
504			_aIncludes bibliographical references and indexes
650		0	_aMetal oxide semiconductors, Complementary _vCongresses
650		0	_aMetal oxide semiconductors _xMaterials _vCongresses
650		0	_aSilicides _vCongresses
650		0	_aGate array circuits _vCongresses
700	1		_aDemkov, Alexander A.
710	2		_aMaterials Research Society. _bMeeting _d(2009 : _cSan Francisco, Calif.)
711	2		_aSymposium C, "CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications" _d(2009 : _cSan Francisco, Calif.)
830		0	_aMaterials Research Society symposium proceedings _vv. 1155
999			_aVIRTUA40 _c63757 _d63763
999			_aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*5040*6500*6501*6502*6503*7000*7100*7110*8300*9992