000 01120nam a2200289 a 4500
001 vtls000064344
003 KUKTEM
005 20251125093340.0
008 120928t2011 gw a g i 001 0 eng d
020 _a9783642221729 (alk. paper)
020 _a3642221726 (alk. paper)
039 9 _a201302181502
_bsafura
_y201209281625
_zsafura
040 _aUMP
090 _aTJ213 .C66 2011
245 0 0 _aControl technologies for emerging micro and nanoscale systems /
_ceditor by Evangelos Eleftheriou and S.O. Reza Moheimani
260 _aBerlin,Germany ;
_bSpringer Verlag,
_c2011
300 _axv, 287 p. :
_bill. (some col.) ;
_c24 cm.
490 1 _aLecture notes in control and information sciences,
_x0170-8643 ;
_v413
500 _aIncludes index
650 0 _aMicroelectromechanical systems
650 0 _aAutomatic control
650 0 _aMicroscopy
700 1 _aEleftheriou, Evangelos
700 1 _aMoheimani, S. O. Reza
830 0 _aLecture notes in control and information sciences ;
_v413
999 _aVIRTUA40
_c63880
_d63886
999 _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*6500*6501*6502*7000*7001*8300*9992