| 000 | 01259nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | vtls000060545 | ||
| 003 | KUKTEM | ||
| 005 | 20251125093358.0 | ||
| 008 | 120529t1989 paua f b 101 0 eng d | ||
| 020 | _a9781558990043 | ||
| 020 | _a1558990046 | ||
| 039 | 9 |
_a201212101242 _bfauzi _y201205291224 _zsafura |
|
| 040 | _aUMP | ||
| 090 | _aTK7874 .C44 1989 | ||
| 245 | 0 | 0 |
_aChemical perspectives of microelectronic materials : _bsymposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A. / _ceditors, MÃhal E. Gross, Joseph M. Jasinski, John T. Yates, Jr. |
| 260 |
_aPittsburgh, Pa. : _bMaterials Research Society, _cc1989 |
||
| 300 |
_axv, 642 p. : _bill. ; _c24 cm. |
||
| 490 | 1 |
_aMaterials Research Society symposium proceedings ; _vv. 131 |
|
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicroelectronics _xMaterials _vCongresses |
|
| 650 | 0 |
_aSemiconductors _vCongresses |
|
| 650 | 0 |
_aSurface chemistry _vCongresses |
|
| 700 | 1 | _aGross, Mihal E. | |
| 700 | 1 | _aJasinski, Joseph M. | |
| 700 | 1 | _aYates, John T. | |
| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 131 |
|
| 999 |
_aVIRTUA40 _c64160 _d64166 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*7002*8300*9992 | ||